Highly Porous NiO Nanoflower-based Humidity Sensor Grown on Seedless Glass Substrate via One-Step Simplistic Immersion Method
N. Parimon1, M. H. Mamat2, M. K. Ahmad3, I. B. Shameem Banu4, M. Rusop5
1N. Parimon, NANO-ElecTronic Centre (NET), Faculty of Electrical Engineering, Universiti Teknologi MARA (UiTM), Shah Alam, Selangor, Malaysia. Faculty of Engineering, Universiti Malaysia Sabah (UMS), Kota Kinabalu, Sabah, Malaysia.
2M. H. Mamat*, NANO-ElecTronic Centre (NET), Faculty of Electrical Engineering, Universiti Teknologi MARA (UiTM), Shah Alam, Selangor, Malaysia. NANO-Scitech Centre (NST), Institute of Science (IOS), Universiti Teknologi MARA (UiTM), Shah Alam, Selangor, Malaysia.
3M. K. Ahmad, Microelectronic and Nanotechnology – Shamsuddin Research Centre (MiNT-SRC), Faculty of Electrical and Electronic Engineering, Universiti Tun Hussein Onn Malaysia (UTHM), Batu Pahat, Johor, Malaysia.
4I. B. Shameem Banu, Department of Physics, B.S. Abdur Rahman Crescent Institute of Science & Technology, Vandalur, Chennai, India.
5M. Rusop, NANO-ElecTronic Centre (NET), Faculty of Electrical Engineering, Universiti Teknologi MARA (UiTM), .Shah Alam, Selangor, Malaysia. NANO-Scitech Centre (NST), Institute of Science (IOS), Universiti Teknologi MARA (UiTM), 40450 Shah Alam, Selangor, Malaysia.
Manuscript received on September 23, 2019. | Revised Manuscript received on October 15, 2019. | Manuscript published on October 30, 2019. | PP: 5718-5722 | Volume-9 Issue-1, October 2019 | Retrieval Number: A3052109119/2019©BEIESP | DOI: 10.35940/ijeat.A3052.109119
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: A highly porous nickel oxide (NiO) nanoflower was deposited directly onto glass substrates by the simplistic immersion method. The nanostructural property of the NiO was studied by X-ray diffraction pattern and obtained high crystal quality after annealing at 500 °Ϲ with an average crystallite size of 15.5 nm. The optical characterization was measured by ultraviolet-visible spectroscopy, with an average transmittance of 58 %. The value of 3.63 eV was estimated and confirmed as NiO bandgap energy. The current-voltage measurement result indicates that the NiO nanoflower has good electrical properties with resistance, resistivity, and conductivity value of 2.31 MΩ, 2.12 Ω.cm, and 4.71 × 10-1 S.cm-1, respectively. The NiO is capable of performing satisfactorily as humidity sensor with a sensitivity of 138 with the response and recovery time were estimated at 389 s and 172 s, respectively. Besides, this sensor has stability at a humidity level of 40 – 90% relative humidity.
Keywords: Highly porous, NiO nanoflower, Glass substrate, Immersion method, Humidity sensor.