A Study on Micro-Electro-Mechanical Systems (Mems) Sensors & Their Applications
Anil Kumar Sharma1, Anuj Kumar Ojha2
1Dr. Anil Kumar Sharma, Professor, Department of Electronics & Communication Engineering, Institute of Engineering & Technology, Alwar, Rajasthan, India.
2Anuj Kumar Ojha, M. Tech. Scholar, Department of Electronics & Communication Engineering, Institute of Engineering & Technology, Alwar, Rajasthan, India.
Manuscript received on may 12, 2012. | Revised Manuscript received on June 03, 2012. | Manuscript published on June 30, 2012. | PP: 80-86 | Volume-1 Issue-5, June 2012 | Retrieval Number: E0434051512/2012©BEIESP
Open Access | Ethics and Policies | Cite
© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: Continued demands for better control of the operating conditions of structures and processes have led to the need for better means of measuring temperature (T), pressure (P), and relative humidity (RH). One way to satisfy this need is to use MEMS technology to develop a sensor that will contain, in a single package, capabilities to simultaneously measure T, P, and RH of its environment. Because of the advantages of MEMS technology, which include small size, low power, very high precision, and low cost, it was selected for use in this paper. Although MEMS sensors that individually measure T, P, and RH exist, there are no sensors that combine all three measurements in a single package. In this paper we present overview of microelectromechanical system (MEMS) sensors and its application, is the technology of very small mechanical devices driven by electricity. The critical physical dimensions of MEMS devices can vary from well below one micron on the lower end of the dimensional spectrum, all the way to several millimeters, it merges at the nano-scale into nanoelectromechanical systems (NEMS) and nanotechnology. MEMS are also referred to as micromachines (in Japan), or micro systems technology – MST (in Europe).
Keywords: MOD, MEMS, MST, NEMS , RH ,SAM.