Design, Simulation and Performance Analysis of Novel Cantilever Rf-Mems Switch Using Serpentine Meanders
N. Siddaiah1, Vamsi Aravind Swamy Tentu2, MD. Z Rehman3
1N. Siddaiah, Department of ECE, Koneru Lakshmaiah Educational Foundation, Vaddeswaram (Andhra Pradesh), India.
2Vamsi Aravind Swamy Tentu, Department of ECE, Koneru Lakshmaiah Educational Foundation, Vaddeswaram (Andhra Pradesh), India.
3MD. Z Rehman, Department of ECE, Koneru Lakshmaiah Educational Foundation, Vaddeswaram (Andhra Pradesh), India.
Manuscript received on 18 April 2019 | Revised Manuscript received on 25 April 2019 | Manuscript published on 30 April 2019 | PP: 1360-1366 | Volume-8 Issue-4, April 2019 | Retrieval Number: D6684048419/19©BEIESP
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© The Authors. Blue Eyes Intelligence Engineering and Sciences Publication (BEIESP). This is an open access article under the CC-BY-NC-ND license (http://creativecommons.org/licenses/by-nc-nd/4.0/)
Abstract: In this paper, we have designed a novel RF MEMS cantilever structure and optimised its dimensions through parametric analysis to minimize the actuation voltage and to enhance the performance of the RF MEMS series switch at Ka-Band frequency. The selection of appropriate materials for the device is also done through the electromechanical parametric analysis. We minimised the dimensions of the switch and increased the performance. To enhance the performance and characteristics of the proposed device electromechanical and solid mechanical analysis such as pull in voltage ,capacitance, switching time, stress analysis, RF performance analysis have been done. The pull in voltage is reduced to 5.5V and the switching time taken by the switch is 0.10msec, Up capacitance formed between the electrodes in ON state is 29.3Ff and Down capacitance is 3.05Pf which are obtained through the Finite element model tools i.e., Comsole 5.0.The RF performance of the switch is done by using the Ansys HFSS simulator ,the switching is having less than 1dB insertion loss and isolation of -28.0dB at 30GHz. the proposed device structure can be used at high frequencies in wireless applications and satellite applications.
Keywords: Cantilever Beam, RF-MEMS Switch, Serpentine Meander, Spring Constant.
Scope of the Article: Routing, Switching and Addressing Techniques